Fully automatic film thickness measuring instrument
JY-FILMTHICK-CT18
JINGYI 景颐
第二 （Product Introduction）
The JY-FILMTHICK-CT18 fully automatic film thickness measuring instrument from Jingyi Optoelectronics utilizes the principle of optical interference to design a highly stable testing platform. With a bridge mounted detection head structure and XY axis ultra large stroke, it can measure large-sized samples of 1.2x0.7m. With one click testing output and automatic positioning, it can perform non-contact, non-destructive, high-precision multi-point measurement of samples. It can be applied to thickness measurement of thin film layers in semiconductor thin films, liquid crystal displays, optical coatings, biomedical applications, and other fields. The OPTICAFILMTEST optical film thickness measurement software adopts various high-precision algorithms such as FFT Fourier method, extremum method, and fitting method. It can set hundreds of test points to measure parameters such as sample reflectivity, color, and film thickness. It also includes a rich material refractive index database and an open material database, effectively assisting users in testing and analysis. During the measurement period, it can display real-time trends such as interference, FFT spectra, and film thickness.
第三（Application Area）
- Industry coverage: High precision film thickness measurement case
- film: AR film、HC film、PET film
- liquid crystal display: OLED、Glass thickness、polyimide、LCD, TFT、ITO、and other TCO
- Semiconductor: Silicon semiconductor、silicon carbide semiconductor、gallium arsenide semiconductor、photoresist、oxide/nitride、process film、dielectric material、silicon or other semiconductor film layer
- Optical coating: HC hard coating、AR anti reflection layer、AG anti glare coating、filter、glasses
- Biomedical science: Parylene、polymers、biofilms、medical devices
第四（Industry Cases）
- Fluoroplastic film: thickness: 162um
- Photoresist: thickness: 72nm
- Parylene: thickness: 2496nm
- ITO film indium tin oxide: thickness: 36nm
- SiO2 silicon dioxide Silicon wafer: thickness: 2108nm
- Perovskite: thickness: 16.7nm
- Quantum dots: thickness: 38.3nm
- PI film: thickness: 30628nm
- Polyurethane: thickness: 26480nm
- HC hardened layer: thickness: 52360nm
- Microfluidic coating: thickness: 3012nm
- PDMS Film Polydimethylsiloxane: thickness: 10.8nm
第五（Product Advantages）
- One click output for automatic positioning and multi-point testing
- Using high-intensity deuterium tungsten lamp light source, the spectrum covers the deep ultraviolet to near-infrared range (190nm~2500nm, including DUV、UV+、U、VIS、NIR、NIR+)
- Based on the principle of interference between reflected light at the upper and lower interfaces of the thin film layer, it is easy to analyze the thickness of the film layer
- Configure powerful core analysis algorithms:
- FFT analysis of thick film
- Curve fitting analysis method
- Extreme value analysis method
- Analyze the physical parameter information of thin films
第六（Product Parameters）
| Project |
Parameter |
| model |
JY-FILMTHICK-CT18 |
| Wavelength range for film thickness measurement |
400nm-1000nm |
| Film thickness detection range |
1μm-250μm |
| measurement accuracy |
0.2% |
| spot size |
Diameter 3mm |
| Maximum sample size |
1200x700mm |
| Single test time |
Better than 1 second |
| Film thickness measurement method |
Single point automatic positioning detection |
| Number of testing points |
Up to 200 test points can be set |
| Moving axis |
XY axis movement |
| Measurable parameters |
Reflectivity, film thickness, color |
| report data |
Can output test data files for different regions of the sample |
| Automatic judgment |
Customizable testing criteria, automatically determining OK or NG |
| positioning accuracy |
0.05mm |
| display |
Embedded industrial grade tablet computer |
| Optional customization function |
Transmittance, refractive index, etc |
第七（Cooperative clients）
- HUAWEI
- CATL 宁德时代
- BYD
- 北京大学 PEKING UNIVERSITY
- 清华大学 Tsinghua University
- 中国航天 Aerospace China
- JCET
- SITP 中国科学院上海技术物理研究所 SHANGHAI INSTITUTE OF TECHNICAL PHYSICS CHINESE ACADEMY OF SCIENCES
