• Brand logo: JINGYI Jingyi
• Product Name: FILMTHICK-C10 Film Thickness Measuring Instrument
• 核心特性：
  • Complex modeling analysis
  • Nano level high precision
  • Film thickness analysis algorithm
  • Precision Spectral Interference Thickness Measurement Method
  • Kilohertz spectral sampling rate

Product Introduction

The FILMTHICK-C10 film thickness measuring instrument from Jingyi Optoelectronics utilizes the principle of optical interference and integrates an imported halogen tungsten lamp light source with a mechanical structure, with a service life of over 10000 hours.
FILMTHICK performs non-contact, non-destructive, and high-precision measurements on samples, and can measure parameters such as reflectivity, color, and film thickness. Can be applied to thickness measurement of thin film layers in semiconductor thin films, liquid crystal displays, optical coatings, biomedical applications, and more. The OPTICAFILMTEST optical film thickness measurement software adopts various high-precision algorithms such as FFT Fourier method, extremum method, and fitting method, including a rich material refractive index database and an open material database, effectively assisting users in testing and analysis. During the measurement period, it can display real-time trends such as interference, FFT spectra, and film thickness.

Application Fields

• Industry Classification and Application：
  • Semiconductors: silicon semiconductors, silicon carbide semiconductors, gallium arsenide semiconductors, photoresist, oxide/nitride process thin films, dielectric materials, silicon or other semiconductor film layers
  • LCD display: OLED, glass thickness, polyimide, LCD TFT, ITO and other TCO
  • Optical coating: HC hard coating, AR anti reflection layer, AG anti glare coating, filter, glasses
  • Biomedical: Parylene, polymers, biofilms, medical devices
  • Thin films: AR film, HC film, PET film

industry case

• Case list (sample name and thickness):
  
  • Fluoroplastic film: thickness: 162um
  • Photoresist: thickness: 72nm
  • Parylene: Thickness: 2496nm
  • ITO film indium tin oxide: thickness: 36nm
  • SiO2 silicon dioxide wafer: thickness: 2108nm
  • Perovskite: Thickness: 16.7nm
  • Quantum dots: thickness: 38.3nm
  • PI film: thickness: 30628nm
  • Polyurethane: Thickness: 26480nm
  • HC hardened layer: thickness: 52360nm
  • Microfluidic coating: thickness: 3012nm
  • PDMS film polydimethylsiloxane: thickness: 10.8nm

Product Features

• Feature 1: Using high-intensity deuterium tungsten lamp light source, the spectrum covers the deep ultraviolet to near-infrared range (the chart shows the wavelength range from 190nm to 2500nm, covering DUV, UV, Visible Light, NIR and other areas).
• Feature 2: Based on the principle of interference of reflected light at the upper and lower interfaces of the thin film layer, it is easy to analyze the thickness of the film layer (illustrated with the optical path diagram of incident light, reflected light, and the thin film and substrate).
• Feature 3: Configure powerful core analysis algorithms: FFT analysis for thick films, curve fitting analysis method for analyzing the physical parameter information of thin films (including schematic diagrams of curve fitting analysis method and FFT fast Fourier analysis method).

Product Specifications

• Parameter table:
  
  
  

  model	C10-UV	C10-UVX	C10	C10-NIRX	C10-NIR
  wavelength range	190-1100nm	190-1700nm	380-1100nm	380-1700nm	950-1700nm
  light source	Deuterium halogen lamp	halogen tungsten lamp	halogen tungsten lamp	halogen tungsten lamp	halogen tungsten lamp
  thickness range	1nm-40um	1nm-250um	10nm-100um	10um-250um	100um-250um
  precision	0.02nm	0.02nm	0.02nm	0.02nm	0.1nm
  Spot size	Standard 1.5mm (optional up to 10um)
  sample size	Standard 300mm (optional)
  Test time	Better than 0.1 seconds
  light source lifetime	10000 hours

Model

• Specification Table:
  
  model	thickness range*	wavelength range
  C10-UV	1nm-40um	190-1100nm
  C10-UVX	1nm-250um	190-1700nm
  C10	10nm-100um	380-1100nm
  C10-NIRX	10um-250um	380-1700nm
  C10-NIR	100um-250um	950-1700nm

• • Footnote: * Depending on the type of film

Cooperative Clients

Customer Logo/Name:

• • HUAWEI (Huawei)
  • Shanghai Institute of Technical Physics (SITP), Chinese Academy of Sciences
  • Peking University
  • Tsinghua University
  • JCET
  • CATL Ningde Times
  • BYD
  • Aerospace China