Product Overview
The FILMTHICK-C40 film thickness measuring instrument utilizes the principle of light interference, featuring an integrated imported halogen tungsten light source with a lifespan exceeding 10,000 hours. It enables non-contact, non-destructive, and high-precision measurement of samples, accurately capturing parameters such as reflectance, color, and film thickness. Suitable for thin film measurement across multiple fields including semiconductors, liquid crystal displays, optical coatings, and biomedicine. The accompanying OPTICAFILMTEST software incorporates high-precision algorithms like FFT Fourier transform and a comprehensive refractive index database for materials. During measurement, it displays interference patterns, spectral waveforms, and film thickness trends in real time, facilitating testing and analysis. The precision spectral measurement system delivers results in seconds. For applications requiring measurements down to 1 micrometer in micro-scale areas or light spots, it performs exceptionally well. Equipped with a foot-operated microscope objective for measurement and a CCD camera, users can accurately read values and clearly view samples through a computer screen.
Product Features
■ Using high-intensity tungsten halogen lamp light source, the spectrum covers the deep ultraviolet to near-infrared range;
■ Based on the principle of interference between reflected light at the upper and lower interfaces of the thin film layer, it is easy to analyze the thickness of the film layer
■ Configure powerful core analysis algorithms: curve fitting analysis method, extreme value analysis method, FFT analysis to analyze the physical parameter information of thick film and
thin film;
Technical Parameters
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model
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C40
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wavelength range
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380-1100nm
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Light source
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Tungsten halogen lamp
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thickness range
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10nm-100um
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accuracy
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0.02nm
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Spot size
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Standard 1.5mm (optional up to 10um)
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sample size
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Standard 300mm (optional)
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Test time
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Better than 0.1 seconds
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light source lifetime
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10000 hours
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Application Domain
High precision film thickness measurement case
Semiconductors (silicon semiconductors, silicon carbide semiconductors, gallium arsenide semiconductors, photoresists, oxides/nitrides, process films, dielectric materials, silicon or other semiconductor film layers)
Liquid Crystal Display (OLED, Glass Thickness, Polyimide, LCD, TFT, ITO, and other TCO)
Optical coating (HC hard coating, AR anti reflection layer, AG anti glare coating, filter, glasses)
Biomedical (Parylene, polymers, biofilms, medical devices)
Thin films (AR film, HC film, PET film)
industry case
Cooperative clients
Huawei Tsinghua University Peking University Ningde Times BYD China Aerospace Chinese Academy of Sciences Institute of Technical Physics
