Overview

FILMTHICK-C20 is a high-precision probe based optical film thickness measurement device. This device is based on the mature principle of reflective spectral interferometry and designed with high-precision fiber optic probes, which can achieve rapid and contact measurement of parameters such as film thickness and refractive index.
The C20 series adopts high-intensity tungsten halogen lamp light source, covering deep ultraviolet to near-infrared band (190-1700nm), combined with high-performance CCD/InGaAs detector and high-speed data acquisition system, it has nanometer level measurement accuracy and kilohertz level sampling rate. The equipment adopts a modular design, and the core components can be independently replaced to reduce maintenance costs and meet the rapid upgrade needs in different scenarios.
This series of products has been widely used in semiconductor wafer inspection, LCD panel coating measurement, optical lens coating quality inspection, biomedical film analysis and other fields, becoming a trusted professional testing equipment in the industry.

Product Features

■ Using high-intensity deuterium/tungsten lamp light source, the spectrum covers the deep ultraviolet to near-infrared range;

 

■ Based on the principle of interference between reflected light at the upper and lower interfaces of the thin film layer, it is easy to analyze the thickness of the film layer

 

 

■ Configure powerful core analysis algorithms: curve fitting analysis method, extreme value analysis method, FFT analysis to analyze the physical parameter information of thick film and

 thin film;

■ High precision fiber optic probe: The probe interface adopts standard SMA905 transmission line to ensure measurement stability and repeatability

Technical Parameters

 

Model

*Depending on the type of film
model	thickness range*	wavelength range
C20-UV	1nm-40um	190-1100nm
C20-UVX	1nm-250um	190-1700nm
C20	10nm-100um	380-1100nm
C20-NIRX	10um-250um	380-1700nm
C20-NIR	100um-250um	950-1700nm

 

 

 

 

 

Application Domain

High precision film thickness measurement case
Semiconductors (silicon semiconductors, silicon carbide semiconductors, gallium arsenide semiconductors, photoresists, oxides/nitrides, process films, dielectric materials, silicon or other semiconductor film layers)
Liquid Crystal Display (OLED, Glass Thickness, Polyimide, LCD, TFT, ITO, and other TCO)
Optical coating (HC hard coating, AR anti reflection layer, AG anti glare coating, filter, glasses)
Biomedical (Parylene, polymers, biofilms, medical devices)
Thin films (AR film, HC film, PET film)

industry case

 

 

Cooperative clients

Huawei Tsinghua University Peking University Ningde Times BYD China Aerospace Chinese Academy of Sciences Institute of Technical Physics