Product Introduction

The FILMTHICK series film thickness measuring instrument utilizes the principle of optical interference and integrates an imported halogen tungsten lamp light source with a mechanical structure, with a service life of over 10000 hours. FILMTHICK performs non-contact, non-destructive, and high-precision measurements on samples, and can measure parameters such as reflectivity, color, and film thickness. Can be applied to thickness measurement of thin film layers in semiconductor thin films, liquid crystal displays, optical coatings, biomedical applications, and more. The OPTICAFILMTEST optical film thickness measurement software adopts various high-precision algorithms such as FFT Fourier method, extremum method, and fitting method, including a rich material refractive index database and an open material database, effectively assisting users in testing and analysis. During the measurement period, it can display real-time trends such as interference, FFT spectra, and film thickness.

Mapping model features:
By analyzing the reflection spectra formed by the interference between the reflected light on the surface of the thin film and the reflected light at the interface between the thin film and the substrate, and using a high-precision R-Theta displacement table, the entire sample can be quickly scanned.
This system has the following characteristics:
① Automatic rapid measurement, single point time<0.5s;
② Point programming, presenting a D distribution;
③ Compatible with 2-12-inch wafers.
Can quickly and accurately measure information such as film thickness and optical constants, and evaluate the uniformity of film thickness.

Technical Parameters
Basic specifications
1. Basic function: Obtain film thickness values and R spectra
2. Spectral analysis range: 380nm-1100nm
3. Measure the spot size: 1-5mm
4. Measurement accuracy of film thickness repeatability: 0.02nm (100nm silicon-based SiO2 sample, 100 repeated measurements)
5. Absolute precision of film thickness: between 0.2% or 2nm, whichever is greater
6. Film thickness stability: better than 0.05nm
7. Film thickness measurement range: 15nm~70um
8. Sample stage: Automated R-Theta mobile platform, sample stage diameter not less than 200mm
9. * Testing method: Automated testing at any multiple points to generate a thickness mapping map (1. circular/square, 2
Radial shape, 3. Center or edge exclusion, 4. Customization (edit coordinate points according to sample needs)
10. Test speed (including vacuum chuck): 5 points in 5 seconds, 25 points in 14 seconds, 57 points in 30 seconds
11. Light source: Standard halogen light source (with a lifespan of 10000 hours)
12. Reflectivity simulation: It can model different coating materials and simulate the reflectivity curve of the coating film system
13. Analysis software: up to hundreds of optical material constant databases, and supports user-defined optical materials
Library; Provide modeling, simulation, and analysis capabilities for multi-layer isotropic optical thin films;

Sample testing table specifications:
1. Measurable wafer sizes: 2 inches&4 inches&6 inches&8 inches&12 inches
2. Mobile range of the stage: not less than 200mm * 200mm
3. Manual placement of samples, automatic mapping measurement, measurement points and positions can be edited as needed in the Recipe
Measurement and analysis software
1. Spectral measurement capability: Reflectance spectral measurement
2. Data analysis ability: film thickness analysis ability, optical constants (refractive index and extinction coefficient)
3. The software uses the Windows platform and sets different levels of user login, such as (Manager/Operator), etc.: high-level users can modify the recipe; Operators can only run existing recipes
4. Display parameters such as the name of the currently running recipe, measurement location number, and remaining time in text or graphic form
5. The software has a history recording function and can store historical record files
6. The software can measure the number of points according to the required equipment
7. Can generate 2D or 3D graphics
8. Drawing functions: Mapping (contour), Line, etc
9. Statistical functions: Max, Min, Average, Median, STD, etc
10. The output data format can be customized, with CSV or EXCEL format